TY  - BOOK
AU  - Wendler, Elke; 
AU  - Wesch, Werner
TI  - Ion beam modification of solids
SN  - 9783319335599
U1  - 530.416 23
PY  - 2016///
CY  - New York, NY
PB  - Springer Berlin Heidelberg
KW  - Bombardement ionique
KW  - Electronics
KW  - Materials
N1  - Includes bibliographical references and index
UR  - https://www.loc.gov/catdir/enhancements/fy1613/2016939918-b.html
UR  - https://www.loc.gov/catdir/enhancements/fy1613/2016939918-d.html
UR  - https://www.loc.gov/catdir/enhancements/fy1613/2016939918-t.html
ER  -